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WEB Determination of optimal crystallographic orientations of LiNbO3 and LiTaO3 plates for bimorph actuators of precise positioning

Tuesday (22.09.2020)
11:35 - 11:50 F: Functional Materials, Surfaces, and Devices 2
Part of:

Actuators of precise positioning allow to activate or control the miniature mechanisms in different engineering devices and systems. In our previous work [1] the bimorph actuator based on LiNbO3 crystal was investigated. It was manufactured from the oppositely polarized plates of LiNbO3 connected by means of diffusion bonding.The copper film was used to bond the plates. The orientation of the plates used in [1] was however not optimal (their polar Z axes were perpendicular to bonded surfaces), so the efficiency of this actuator was lower in comparison, e.g. with the one described in [2]. In current work, to ensure the highest possible displacements of the actuator, the optimal orientations of the plates are calculated for LiNbO3 and LiTaO3 crystals. Further, the directions of longitudinal axis of bimorph and electrical field ensuring the maximal elongation/shortening of plates are determined. Finally, the displacements of the optimized actuators were calculated by finite elements method. The results of these calculations were compared with results in [1] and the actuators based on the commercial plates of LiNbO3 (Y+128o cut) and LiTaO3 (Y+36o cut). It is shown that the optimization allows to significantly increase the actuator displacements – in 26 times for LiNbO3 and 4 times for LiTaO3 comparing to the values obtained for the same geometry as in [1]. In comparison with the actuator realized on commercial plates, the increase of efficiency for about 11 % for LiNbO3 and 66.5 % for LiTaO3 is possible. Generally, the displacements of LiNbO3-actuators are about 3 times higher, than those of LiTaO3.

1. O. Buryy, D. Sugak I.I. Syvorotka, U. Yakhnevych, Yu. Suhak, S. Ubiskii, and H. Fritze, Simulation, Manufacturing and Testing of the Actuator of Precise Positioning Based on the Bimorph Plate of Lithium Niobate // 2019 IEEE XVth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH).

2. I.V Kubasov, M.D Malinkovich, R.N. Zhukov, D.A. Kiselev, S.V. Ksenich, A.S. Bykov, N.G. Timushkin, A.A. Temirov and Yu.N. Parkhomenko, Precision hysteresis-free actuators of the micro- and nano-range displacements based on lithium niobate // International Scientific and Technical Conference INTERMATIC, 2014, Moscow, p. 45-48.

Prof. Oleh Buryy
Lviv Polytechnic National University
Additional Authors:
  • Dr. Dmytro Sugak
    Lviv Polytechnic National University
  • Dr. Ihor Syvorotka
    Scientific Research Company 'Electron-Carat'
  • Uliana Yakhnevych
    Lviv Polytechnic National University
  • Dr. Yurij Suhak
    Clausthal University of Technology
  • Prof. Serhij Ubizskii
    Lviv Polytechnic National University
  • Prof. Holger Fritze
    Clausthal University of Technology