Full zT-Characterization of Electrodeposited Materials and its Application in Micro Thermoelectric DevicesWednesday (01.01.2020) 00:00 - 00:15 Part of:
Micro thermoelectric (TE) harvesting or Peltier cooling devices will be prospectively used in a broad range of applications from industry to consumer products. Successful optimization of the thermoelectric figure of merit, zT, is a key enabler for the introduction of these devices to application. Especially, the TE characterization of films grown by electrochemical deposition, which is a common technique for the fabrication of micro TE devices, remains a great challenge. Therefore, we present a platform for the full in-plane zT characterization of electrochemically deposited TE materials, eliminating the electrical shortcut through the conducting seed layer. The transport characterization could be realized using a suspended TE material within a transport device prepared by a combination of photolithography and etching processes. This full in-plane zT characterization provides an inevitable milestone for a materials optimization under realistic conditions in micro TE devices. The TE characterization of electrochemically deposited materials and its application in micro TE devices will be presented.